Journal of vacuum science & technology. B, Microelectronics and nanometer structures

Other titles
Journal of vacuum science & technology., International journal devoted to microelectronics and nanometer structures; Microelectronics and nanometer structures; Journal of vacuum science and technology., Microelectronics and nanometer structures; JVST B
Corp./Body Author
American Vacuum Society American Institute of Physics
Publisher
Published for the Society by the American Institute of Physics
Place of publication
New York
From year - To year
1991-2010
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
1071-1023
ISSN-L
1071-1023
Codice Dewey code
621.381/05
Journal code
P 00232448
Database
acnp
Medium
Printed text
Acnp cumulative hol.
1991-2010.
Annate con indici
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