Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Other titles
Journal of vacuum science & technology., International journal devoted to microelectronics and nanometer structures; Microelectronics and nanometer structures; Journal of vacuum science and technology., Microelectronics and nanometer structures; JVST B
Corp./Body Author
American Vacuum Society American Institute of Physics
Publisher
Published for the Society by the American Institute of Physics