Other titles
Microelectronics processing and phenomena; Journal of vacuum science and technology., Microelectronics processing and phenomena
Corp./Body Author
American Vacuum Society;American Institute of Physics
Place : Publisher
New York, N.Y. : Published for the Society by the American Institute of Physics
From year - To year
1983-1990
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
0734-211X
ISSN-L
0734-211X
Codice Dewey code
621.5/5/05
Journal code
P 00081058
Database
acnp
Medium
Printed text
Journal public access
Continued in part by
Other physical media
Libraries
